Preparation and Characterization of BaTiO3 Thin Films Using Reactive Sputtering Method with Metal Target

Publication Information

Title

Japanese:
English:	Preparation and Characterization of BaTiO3 Thin Films Using Reactive Sputtering Method with Metal Target

Author

Japanese:	Tsuyoshi Osumi, Masamichi Nishide, 舟窪浩, Hiromi Shima, 西田謙, Takashi Yamamoto.
English:	Tsuyoshi Osumi, Masamichi Nishide, Hiroshi Funakubo, Hiromi Shima, Ken Nishida, Takashi Yamamoto.

Language

English

Journal/Book name

Japanese:
English:	Integ. Ferro.

Volume, Number, Page

Vol. 133 pp. 42-48

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI