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Title
Japanese: 
English:A newly developed STM-based coordinate measuring machine 
Author
Japanese: 澤野 宏, 後閑 利通, 吉岡 勇人, 新野 秀憲.  
English: Hiroshi Sawano, Toshimichi Gokan, Hayato Yoshioka, Hidenori Shinno.  
Language English 
Journal/Book name
Japanese: 
English:Precision Engineering 
Volume, Number, Page Vol. 36    No. 4    pp. 538-545
Published date July 21, 2012 
Publisher
Japanese: 
English:Elsevier 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1016/j.precisioneng.2012.02.007
Abstract Demands for precision measurement of three dimensional micro-geometries over a large area have recently increased in a variety of industries. In order to meet such requirements, it is necessary to develop a novel coordinate measuring machine (CMM) which has high resolution together with larger than 10 mm scale measuring range. This paper presents a newly developed CMM with nanometer spatial resolution based on a scanning tunneling microscopy principle. The developed CMM is composed of a planar nano-motion control system driven by voice coil motors and a vertical nano-motion system driven by a hybrid actuator. Furthermore, in order to achieve long-term stability and repeatability, the machine is installed on an active vibration isolating system inside a temperature-controlled enclosure. Performance evaluation results confirm that the CMM has nanometer spatial resolution, large measuring range and high structural stability.
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