Mist chemical vapor deposition of γ-phase Ga<sub>2</sub>O<sub>3</sub> thin films

Publication Information

Title

Japanese:
English:	Mist chemical vapor deposition of γ-phase Ga₂O₃ thin films

Author

Japanese:	大島孝仁, 中園敦士, 向井章, 大友明.
English:	T. Oshima, T. Nakazono, A. Mukai, A. Ohtomo.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Aug. 26, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	39th International Symposium on Compound Semiconductors

Conference site

Japanese:	カリフォルニア州サンタバーバラ
English:	Santa Barbara