A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language

Publication Information

Title

Japanese:
English:	A CMOS-MEMS Design Technique based on an Electrical Circuit Simulator with Hardware Description Language

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 25, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)

Conference site

Japanese:	京都
English:	Kyoto

Official URL