A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer

Publication Information

Title

Japanese:
English:	A Novel Sensor Structure and its Fabrication Process for Integrated CMOS-MEMS Accelerometer

Author

Japanese:	山根大輔, 松島隆明, 小西敏文, 本橋剛, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Sept. 27, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2012 Int. Conf. on Solid State Devices and Materials (SSDM 2012)

Conference site

Japanese:	京都
English:	Kyoto

Official URL