Synthesis of diamond films by plasma enhanced hot-filament CVD at low substrate temperature

Publication Information

Title

Japanese:
English:	Synthesis of diamond films by plasma enhanced hot-filament CVD at low substrate temperature

Author

Japanese:	前田英俊, 浅野禎介, 望月佳彦, 安原鋭幸, 大竹尚登.
English:	Hidetoshi Maeda, Tadasuke Asano, Yoshihiko Mochizuki, Toshiyuki Yasuhara, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	IUMRS-ICEM2012

Volume, Number, Page

CD-ROM

Published date

Sept. 25, 2012

Publisher

Japanese:
English:	IUMRS-International Conference on Electronic Materials2012

Conference name

Japanese:
English:	IUMRS-International Conference on Electronic Materials2012

Conference site

Japanese:
English:	Yokohama