Detection of Bulk Defects of DLC Films Deposited by Pulse Plasma CVD

Publication Information

Title

Japanese:
English:	Detection of Bulk Defects of DLC Films Deposited by Pulse Plasma CVD

Author

Japanese:	櫻田悠一, 高島舞, 安原鋭幸, 岩本喜直, 松尾誠, 大竹尚登.
English:	Yuichi Sakurada, Mai Takashima, Toshiyuki Yasuhara, Yoshinao Iwamoto, Makoto Matsuo, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	IUMRS-ICEM2012

Volume, Number, Page

CD-ROM

Published date

Sept. 25, 2012

Publisher

Japanese:
English:	IUMRS-International Conference on Electronic Materials2012

Conference name

Japanese:
English:	IUMRS-International Conference on Electronic Materials2012

Conference site

Japanese:
English:	Yokohama