Synthesis of Antimony Doped Amorphous Carbon Films

Publication Information

Title

Japanese:
English:	Synthesis of Antimony Doped Amorphous Carbon Films

Author

Japanese:	奥山紘章, 高島舞, 赤坂大樹, 大竹尚登.
English:	Hiroaki Okuyama, Mai Takashima, Hiroki Akasaka, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Abstracts of 11th APCPST & 25th SPSM

Volume, Number, Page

pp. 339

Published date

Oct. 3, 2012

Publisher

Japanese:
English:	The 11th Committee on APCPST,The 153rd Committee on Plasma Materials Science,Japan Society for the Promotion of Science

Conference name

Japanese:
English:	11th APCPST (Asia Pacific Conference on Plasma Science and Technology) and 25th SPSM (Symposium on Plasma Science for Materials)

Conference site

Japanese:
English:	Kyoto