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Publication Information
Title
Japanese:
パルスプラズマCVD法により成膜したDLC膜のマクロ欠陥検出
English:
Author
Japanese:
櫻田 悠一
,
高島 舞
,
赤坂 大樹
,
岩本 喜直
, 松尾 誠,
大竹 尚登
.
English:
Yuichi Sakurada
,
Mai Takashima
,
Hiroki Akasaka
,
yoshinao iwamoto
, 松尾 誠,
NAOTO OHTAKE
.
Language
Japanese
Journal/Book name
Japanese:
2012年度精密工学会秋季大会学術講演会
English:
Volume, Number, Page
CD-ROM
Published date
Sept. 14, 2012
Publisher
Japanese:
精密工学会
English:
Conference name
Japanese:
2012年度精密工学会秋季大会学術講演会
English:
Conference site
Japanese:
北九州市
English:
©2007
Tokyo Institute of Technology All rights reserved.