A Novel Self-Aligned Gate-Overlapped LDD Poly-Si TFT with High Reliability and Performance | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	A Novel Self-Aligned Gate-Overlapped LDD Poly-Si TFT with High Reliability and Performance

Author

Japanese:	波多野睦子.
English:	Mutsuko Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

1997

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Int. Electron Devices Meeting 1997

Conference site

Japanese:
English:	Washington

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