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Publication Information
Title
Japanese:
English:
Fabrication of Bio-MEMS Device for on-
Author
Japanese:
辛 永式
,
勝部 恭平
,
澤田 和明
,
石田 誠
,
石井 仁
,
町田 克之
,
益一哉
,
飯田健一郎
,
齋藤光正
,
吉田眞一
.
English:
Youngshik Shin
,
Kyohei Katsube
,
Kazuaki Sawada
,
Makoto Ishida
,
Hiromu Ishii
,
Katsuyuki Machida
,
Kazuya Masu
,
Kenichiro Iida
,
Mitsumasa Saito
,
Shinichi Yoshida
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Apr. 9, 2012
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI Symp.B, 2012 MRS Spring Meeting, JSAP-MRS
Conference site
Japanese:
English:
San Francisco
Official URL
http://www.mrs.org/spring-meetings/
©2007
Tokyo Institute of Technology All rights reserved.