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Title
Japanese: 
English:Fabrication of Bio-MEMS Device for on- 
Author
Japanese: 辛 永式, 勝部 恭平, 澤田 和明, 石田 誠, 石井 仁, 町田 克之, 益一哉, 飯田健一郎, 齋藤光正, 吉田眞一.  
English: Youngshik Shin, Kyohei Katsube, Kazuaki Sawada, Makoto Ishida, Hiromu Ishii, Katsuyuki Machida, Kazuya Masu, Kenichiro Iida, Mitsumasa Saito, Shinichi Yoshida.  
Language English 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date Apr. 9, 2012 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:Heterogeneous Integration Challenges of MEMS, Sensor and CMOS LSI Symp.B, 2012 MRS Spring Meeting, JSAP-MRS 
Conference site
Japanese: 
English:San Francisco 
Official URL http://www.mrs.org/spring-meetings/
 

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