Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method

Publication Information

Title

Japanese:
English:	Estimation of Electron Temperature and Density of the Decay Plasma in a Laser-assisted Discharge Plasma Extreme Ultraviolet Source by using a Modified Stark Broadening Method

Author

Japanese:	武藤敬宏, ｽﾞｷｭｼ, 山田淳三郎, 岸望, 渡邊正人, 堀田栄喜.
English:	T. Muto, Q. Zhu, J. Yamada, N. Kishi, M. Watanabe, E. Hotta.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 30, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	25th International Microprocesses and Nanotechnology Conference (MNC 2012)

Conference site

Japanese:
English:	Kobe