Detecting Method of Bulk Defects in DLC Films Using Light Scattering

Publication Information

Title

Japanese:
English:	Detecting Method of Bulk Defects in DLC Films Using Light Scattering

Author

Japanese:	櫻田悠一, 高島舞, 安原鋭幸, 岩本喜直, Makoto Matsuo, 大竹尚登.
English:	Yuichi Sakurada, Mai Takashima, Toshiyuki Yasuhara, Yoshinao Iwamoto, Makoto Matsuo, Naoto Ohtake.

Language

English

Journal/Book name

Japanese:
English:	Emerging Technology in Precision Engineering

Volume, Number, Page

pp. 793-798

Published date

Nov. 8, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	14th International Conference on Precision Engineering(ICPE2012)

Conference site

Japanese:
English:	Hyogo

DOI