Heat Transfer and Phase Transformations in Excimer Laser Annealing of Thin Si Films | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Heat Transfer and Phase Transformations in Excimer Laser Annealing of Thin Si Films

Author

Japanese:	波多野睦子.
English:	Mutsuko Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

77-80

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Int. Workshop on Active Matrix Liquid Crystal Displays AM-LCD 00

Conference site

Japanese:
English:	Tokyo

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