High-Quality Poly-Si Crystallization Technology Based on Laser-Induced Melting and Resolidification Dynamics of Si Thin Films

Publication Information

Title

Japanese:
English:	High-Quality Poly-Si Crystallization Technology Based on Laser-Induced Melting and Resolidification Dynamics of Si Thin Films

Author

Japanese:	波多野睦子.
English:	Mutsuko Hatano.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

57-62

Published date

2003

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Asia Pacific Laser Symposium 2003

Conference site

Japanese:
English:	Hamamatsu