Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films

Publication Information

Title

Japanese:
English:	Relationship between fluence gradient and lateral grain growth in spatially controlled excimer laser crystallization of amorphous silicon films

Author

Japanese:	S. Moon, 波多野睦子, K. Suzuki, C. Grigoropoulos.
English:	S. Moon, M. Hatano, K. Suzuki, C. Grigoropoulos.

Language

English

Journal/Book name

Japanese:
English:	Journal of Applied Physics

Volume, Number, Page

88 4994-4999

Published date

2000

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: