High-Speed Drilling Through-Holes in Borosilicate Glass Substrate by High-Peak-Power CO2 Laser

Publication Information

Title

Japanese:
English:	High-Speed Drilling Through-Holes in Borosilicate Glass Substrate by High-Peak-Power CO2 Laser

Author

Japanese:	Tomotaka Katsura, Reona Nakamura, Shinichi Fujikawa, Takuji Magara, 稲川貴大, 青野祐子, 戸倉和.
English:	Tomotaka Katsura, Reona Nakamura, Shinichi Fujikawa, Takuji Magara, Takahiro Inagawa, Yuko Aono, Hitoshi Tokura.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2nd Annual IEEE Global Interposer Technology Workshop 2012

Conference site

Japanese:	Atlanta
English: