Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3 Film by Metalorganic Chemical Vapor Deposition

Publication Information

Title

Japanese:
English:	Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3 Film by Metalorganic Chemical Vapor Deposition

Author

Japanese:	Shintaro Yokoyama, Kenji Takahashi, Shoji Okamoto, Atsushi Nagai, Jun Minamidate, Keisuke Saito, Naoki Ohashi, Hajime Haneda, 坂田修身, Shigeru Kimura, Ken Nishida, Takashi Katoda, 舟窪浩.
English:	Shintaro Yokoyama, Kenji Takahashi, Shoji Okamoto, Atsushi Nagai, Jun Minamidate, Keisuke Saito, Naoki Ohashi, Hajime Haneda, Osami Sakata, Shigeru Kimura, Ken Nishida, Takashi Katoda, Hiroshi Funakubo.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl. Phys.

Volume, Number, Page

Vol. 45 No. 6A pp. 5102-5106.

Published date

2006

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: