Fabrication of Electrically Active Si-based Thin Films by Pulsed Laser Deposition of SiO/C Dual Targets

Publication Information

Title

Japanese:
English:	Fabrication of Electrically Active Si-based Thin Films by Pulsed Laser Deposition of SiO/C Dual Targets

Author

Japanese:	小野裕三郎, 加藤侑志, 秋田泰志, 保坂誠, 白石尚輝, Makoto Yamaguchi, 坂田修身.
English:	Yusaburo Ono, Yushi Kato, Yasuyuki Akita, Makoto Hosaka, Naoki Shiraishi, Makoto Yamaguchi, Osami Sakata.

Language

English

Journal/Book name

Japanese:
English:	Mater. Res. Soc. Symp. Proc.

Volume, Number, Page

Vol. 1148

Published date

2009

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI