低気圧放電窒素プラズマの発光分光計測〜温度計測と解離度測定の新展開

Publication Information

Title

Japanese:	低気圧放電窒素プラズマの発光分光計測〜温度計測と解離度測定の新展開
English:	Optical Emission Spectroscopic Measurement of Low-Pressure Discharge Nitrogen Plasma — Recent Development of Temperature and Dissociation Degree Measurement

Author

Japanese:	赤塚洋.
English:	Hiroshi Akatsuka.

Language

Japanese

Journal/Book name

Japanese:	Sputtering & Plasma Prosesses
English:	Sputtering & Plasma Prosesses

Volume, Number, Page

Vol. 28 No. 1 pp. 11-20

Published date

Mar. 14, 2013

Publisher

Japanese:	一般社団法人日本真空学会
English:	The Vacuum Society of Japan

Conference name

Japanese:	スパッタリング及びプラズマプロセス技術部会(SP部会)第132回定例研究会テーマ:「プラズマ計測・診断の最前線」
English:	The 132nd regular research meeting of Sputtering and Plasma Process Sub-Division, the Vacuum Society of Japan

Conference site

Japanese:	東京
English:	Tokyo