減圧マイクロ波放電水素プラズマの分子回転温度計測とガス温度の推定

Publication Information

Title

Japanese:	減圧マイクロ波放電水素プラズマの分子回転温度計測とガス温度の推定
English:	OES Measurement of Molecular Rotational Temperature and Estimation of Gas Temperature of a Low-Pressure Microwave Discharge Hydrogen Plasma

Author

Japanese:	赤塚洋, 清水良浩, 根津篤, 松浦治明.
English:	Hiroshi Akatsuka, Yoshihiro Shimizu, Atsushi Nezu, Haruaki Matsuura.

Language

Japanese

Journal/Book name

Japanese:	平成25年電気学会全国大会講演論文集
English:	2013 Annual Meeting Record, IEE Japan

Volume, Number, Page

Vol. 1 p. 208

Published date

Mar. 5, 2013

Publisher

Japanese:	一般社団法人電気学会
English:	The Institute of Electrical Engineers of Japan

Conference name

Japanese:	平成25年電気学会全国大会
English:	2013 Annual Meeting, IEE Japan

Conference site

Japanese:	名古屋
English:	Nagoya