Investigation of Sputtering Damage in SrRuO3 Films Prepared by Sputtering with Raman and X-ray Photoemission Spectroscopies

Publication Information

Title

Japanese:
English:	Investigation of Sputtering Damage in SrRuO3 Films Prepared by Sputtering with Raman and X-ray Photoemission Spectroscopies

Author

Japanese:	Takeshi Tai, Masamichi Nishide, Masashi Matsuoka, 加茂嵩史, 舟窪浩, 河東田隆, Hiromi Shima, Ken Nishida, Takashi Yamamoto.
English:	Takeshi Tai, Masamichi Nishide, Masashi Matsuoka, Takafumi Kamo, Hiroshi Funakubo, Takashi Katoda, Hiromi Shima, Ken Nishida, Takashi Yamamoto.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. App. Phys.

Volume, Number, Page

Vol. 51 pp. 09LA19-1-4

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: