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Publication Information
Title
Japanese:
レーザ加工用多自由度レンズ駆動アクチュエータの電磁力非線形補償の研究
English:
Author
Japanese:
森本 貴景
,
進士 忠彦
, 中井 孝洋, 福岡 輝章.
English:
Yoshihiro Morimoto
,
TADAHIKO SHINSHI
, 中井 孝洋, 福岡 輝章.
Language
Japanese
Journal/Book name
Japanese:
2013年度精密工学会春季大会学術講演会講演論文集
English:
Volume, Number, Page
p. 781-782
Published date
Mar. 13, 2013
Publisher
Japanese:
精密工学会
English:
Conference name
Japanese:
2013年度精密工学会春季大会
English:
Conference site
Japanese:
東京
English:
©2007
Institute of Science Tokyo All rights reserved.