Experimental Study of Self-Heating Effect (SHE) in SOI MOSFETs: Accurate Understanding of Temperatures During AC Conductance Measurement, Proposals of 2ω Method and Modified Pulsed IV

Publication Information

Title

Japanese:
English:	Experimental Study of Self-Heating Effect (SHE) in SOI MOSFETs: Accurate Understanding of Temperatures During AC Conductance Measurement, Proposals of 2ω Method and Modified Pulsed IV

Author

Japanese:	別府伸耕, 高橋綱己, 小田俊理, 内田建.
English:	N. Beppu, T. Takahashi, S Oda, K. Uchida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 641-644

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEDM 2012

Conference site

Japanese:
English:	San Francisco