斜方入射スパッタ粒子を利用して作製した高異方性磁界を有するFeCoB膜

Publication Information

Title

Japanese:	斜方入射スパッタ粒子を利用して作製した高異方性磁界を有するFeCoB膜
English:	FeCoB Films with High In-Plane Uniaxial Magnetic Anisotropy Field Prepared Using Oblique Incidence of Sputtered Particles

Author

Japanese:	中川茂樹.
English:	SHIGEKI NAKAGAWA.

Language

Japanese

Journal/Book name

Japanese:	日本磁気学会誌まぐね
English:	Magnetics Japan

Volume, Number, Page

Vol. 7 No. 1 pp. 26-32

Published date

Dec. 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: