Experimental Evidence of Increased Deformation Potential at MOS Interface and Its Impact on Characteristic of ETSOI FETs

Publication Information

Title

Japanese:
English:	Experimental Evidence of Increased Deformation Potential at MOS Interface and Its Impact on Characteristic of ETSOI FETs

Author

Japanese:	大橋輝之, 高橋綱己, 別府伸耕, 小田俊理, 内田建.
English:	T. Ohashi, T. Takahashi, N. Beppu, S. Oda, K. Uchida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 390-393

Published date

2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEDM 2011

Conference site

Japanese:
English:	Washington DC