集積化CMOS-MEMS技術の検討

Publication Information

Title

Japanese:	集積化CMOS-MEMS技術の検討
English:

Author

Japanese:	町田克之, 小西敏文, 山根大輔, 年吉洋, 益一哉.
English:	Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Mar. 22, 2013

Publisher

Japanese:
English:

Conference name

Japanese:	平成25年度電気学会全国大会・シンポジウム（S24）ワイヤレス通信応用RF-MEMS技術
English:

Conference site

Japanese:	愛知県
English: