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Publication Information
Title
Japanese:
アレイ型CMOS-MEMS加速度センサのためのデバイスの評価
English:
Author
Japanese:
加賀谷 賢
,
小西敏文
,
山根大輔
,
本橋 剛
,
松島隆明
,
伊藤浩之
,
石原 昇
,
年吉 洋
,
町田克之
,
益一哉
.
English:
Ken Kagaya
,
Toshifumi Konishi
,
Daisuke Yamane
,
gou motohashi
,
Takaaki Matsushima
,
Hiroyuki Ito
,
Noboru Ishihara
,
Hiroshi Toshiyoshi
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
Mar. 29, 2013
Publisher
Japanese:
English:
Conference name
Japanese:
第60回応用物理学会春季学術講演会・合同セッションL(MEMS、NEMSの基礎と応用:異種機能集積化)
English:
Conference site
Japanese:
神奈川県
English:
©2007
Tokyo Institute of Technology All rights reserved.