Stack structures of ALD- La2O3 and CVD-CeO2 : fabrication and mobility improvement effects

Publication Information

Title

Japanese:
English:	Stack structures of ALD- La2O3 and CVD-CeO2 : fabrication and mobility improvement effects

Author

Japanese:	幸田みゆき, 鈴木拓也, 角嶋邦之, パールハットアヘメト, 岩井洋.
English:	Miyuki Kouda, 鈴木拓也, Kuniyuki KAKUSHIMA, パールハットアヘメト, HIROSHI IWAI.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	IEEE EDS MQ WIMNACT 32 C0-sponsored by EDS Japan Chapter and TIT

Conference site

Japanese:
English: