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Title
Japanese: 
English:Novel Sensor Structure and its Evaluation for Integratd Complementary Metal Oxide Semiconductor Microelectromechanical Systems Accelerometer 
Author
Japanese: 小西 敏文, 山根 大輔, 松島 隆明, 本橋 剛, 加賀谷 賢, 伊藤 浩之, 石原 昇, 年吉 洋, 町田 克之, 益 一哉.  
English: Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Gou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.  
Language English 
Journal/Book name
Japanese: 
English:Japanese Journal of Applied Physics 
Volume, Number, Page Vol. 52    No. 6    pp. 06GL04
Published date June 20, 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.7567/JJAP.52.06GL04
Abstract This paper reports a novel sensor structure and its evaluation results for an integrated complementary metal oxide semiconductor (CMOS) microelectromechanical systems (MEMS) accelerometer with a wide detection range on a chip. The proposed sensor structure has the following features: i) a layer separation technique between the proof mass and the mechanical suspensions, ii) mechanical stoppers for the proof mass to avoid destruction, and iii) a SiO2 film underneath the proof mass to prevent stiction and electrical short. Gold was used as the MEMS structure material to reduce the proof mass size and to lower the Brownian noise to below 100 ?g/√Hz. Furthermore, the micro fabrication was carried out below 310 °C for the CMOS devices to remain intact. The evaluation results indicate that the Brownian noise was 90.6 ?g/√Hz. Thus, we have confirmed that the proposed MEMS structure has the potential for use in future integrated CMOS-MEMS accelerometers.

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