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Title
Japanese:第25節 光学法、X線法によるアモルファスIGZO薄膜の構造・物性解析; 光学薄膜の最適設計・成膜技術と膜厚・膜質・光学特性の制御 
English: 
Author
Japanese: 神谷利夫, 細野秀雄.  
English: TOSHIO KAMIYA, HIDEO HOSONO.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 367-376
Published date 2013 
Publisher
Japanese: 
English:2013/6/28 株式会社 技術情報協会発行 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 

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