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Title
Japanese: 
English:MZI optical isolator with Si-wire waveguides by surface-activated direct bonding 
Author
Japanese: 庄司 雄哉, 伊藤 正俊, 白土 雄也, 水本 哲弥.  
English: Yuya Shoji, Masatoshi Ito, Yuya Shirato, Tetsuya MIZUMOTO.  
Language English 
Journal/Book name
Japanese: 
English:Optics Express 
Volume, Number, Page Vol. 20    No. 16    pp. 18440-18448
Published date July 27, 2012 
Publisher
Japanese: 
English:The Optical Society (OSA) 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1364/OE.20.018440
Abstract We fabricate a Mach-Zehnder interferometer-based optical isolator using a silicon-wire waveguide with magneto-optic garnet cladding using direct bonding techniques. Using Si-wire waveguides, the size of the device is greatly reduced from that of our previous device. We investigate surface-activated direct bonding with nitrogen plasma treatment, which shows better bonding results than oxygen plasma treatment. A large magneto-optic phase shift of 0.8π and an optical isolation of 18 dB are obtained at a wavelength of 1322 nm.

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