Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Publication Information

Title

Japanese:	Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films
English:	Dissociative Excitation of C2H2 in the Electron Cyclotron Resonance Plasma of Ar: Production of CH(A2) Radicals and Formation of Hydrogenated Amorphous Carbon Films

Author

Japanese:	Haruhiko Ito, Katsuaki Koshimura, Saori Onitsuka, Kohtaro Okada, Tsuneo Suzuki, Hiroki Akasaka, Hidetoshi Saitoh.
English:	Haruhiko Ito, Katsuaki Koshimura, Saori Onitsuka, Kohtaro Okada, Tsuneo Suzuki, Hiroki Akasaka, Hidetoshi Saitoh.

Language

English

Journal/Book name

Japanese:	Plasma Chem Plasma Process
English:	Plasma Chem Plasma Process

Volume, Number, Page

Vol. 32 pp. 231–248

Published date

Mar. 1, 2012

Publisher

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Conference name

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Conference site

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