AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	AN ARRAYED MEMS ACCELEROMETER WITH A WIDE RANGE OF DETECTION

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 22-25

Published date

June 16, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	17th Int. Conf on Solid-State Sensors, Actuators and Microsystems (Transducers 2013)

Conference site

Japanese:
English:	Barcelona

Official URL

http://transducers-eurosensors2013.org/

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