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Title
Japanese:金メッキ集積化CMOS-MEMSによるアレイ型加速度センサの小型化 
English: 
Author
Japanese: 山根大輔, 小西敏文, 松島隆明, 加賀谷 賢, 佃 真文, 伊藤浩之, 石原 昇, 年吉 洋, 町田克之, 益 一哉.  
English: Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Ken Kagaya, Masafumi Tsukuda, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date July 26, 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese:応用物理学会集積化ＭＥＭＳ技術研究会 第４回集積化ＭＥＭＳ技術研究ワークショップ 
English: 
Conference site
Japanese:大阪府 
English: 

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