Improved algorithm for multiwavelength single-shot interferometric surface profiling:Speeding up the multiwavelength-integrated local model fitting method by local information sharing.

Publication Information

Title

Japanese:
English:	Improved algorithm for multiwavelength single-shot interferometric surface profiling:Speeding up the multiwavelength-integrated local model fitting method by local information sharing.

Author

Japanese:	仲田圭佑, 杉山将, Kitagawa, K., Otsuki, M..
English:	Nakata, K., Sugiyama, M., Kitagawa, K., Otsuki, M..

Language

English

Journal/Book name

Japanese:
English:	Applied Optics

Volume, Number, Page

vol. 52 no. 17 pp. 4042-4053

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI