Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology | Tokyo Tech Research Repository (T2R2)

Publication Information

Title

Japanese:
English:	Novel Sensor Circuits Design Using Multi-physics Simulation for CMOS-MEMS Technology

Author

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. G-4-2

Published date

Sept. 24, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2013 Int. Conf. on Solid State Devices and Materials (SSDM 2013)

Conference site

Japanese:
English:	Fukuoka

Official URL

http://www.ssdm.jp/index.html

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