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Title
Japanese:ケイ素の脱離による炭化ケイ素膜の表面改質 
English: 
Author
Japanese: 西尾龍哉, 青野祐子, 平田敦.  
English: Tatsuya Nishio, Yuko Aono, ATSUSHI HIRATA.  
Language Japanese 
Journal/Book name
Japanese: 
English:2013年度精密工学会春季大会学術講演会講演論文集 
Volume, Number, Page         pp. 665-666
Published date Mar. 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English:2013年度精密工学会春季大会学術講演会 
Conference site
Japanese:東京 
English: 

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