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Title
Japanese:マルチフィジクスシミュレーションを用いた集積化CMOS-MEMS技術のためのセンサ回路の検討 
English: 
Author
Japanese: 小西敏文, 山根大輔, 松島隆明, 丸山智史, 加賀谷 賢, 伊藤浩之, 石原 昇, 年吉 洋, 町田克之, 益 一哉.  
English: Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Satoshi Maruyama, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 6PM3-PIM-001
Published date Nov. 5, 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese:応用物理学会集積化ＭＥＭＳ技術研究会 第５回集積化ＭＥＭＳシンポジウム 
English: 
Conference site
Japanese:宮城県仙台市 
English: 
Official URL http://www.sensorsymposium.org/index_j.html
 

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