Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System

Publication Information

Title

Japanese:
English:	Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System

Author

Japanese:	津村拓実, 吉岡勇人, 新野秀憲, 澤野宏.
English:	Takumi Tsumura, Hayato Yoshioka, hidenori shinno, sawano hiroshi.

Language

English

Journal/Book name

Japanese:
English:	Proceedings of The 7th International Conference on Leading Edge Manufacturing in 21st Century

Volume, Number, Page

Published date

Nov. 7, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 7th International Conference on Leading Edge Manufacturing in 21st Century

Conference site

Japanese:	松島，宮城
English:	Matsushima, Miyagi