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Publication Information
Title
Japanese:
English:
Magnetic Attraction Force-preloaded Aerostatic Guideway for High Speed Nano Positioning System
Author
Japanese:
津村 拓実
,
吉岡勇人
,
新野 秀憲
,
澤野 宏
.
English:
Takumi Tsumura
,
Hayato Yoshioka
,
hidenori shinno
,
sawano hiroshi
.
Language
English
Journal/Book name
Japanese:
English:
Proceedings of The 7th International Conference on Leading Edge Manufacturing in 21st Century
Volume, Number, Page
Published date
Nov. 7, 2013
Publisher
Japanese:
English:
Conference name
Japanese:
English:
The 7th International Conference on Leading Edge Manufacturing in 21st Century
Conference site
Japanese:
松島,宮城
English:
Matsushima, Miyagi
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Tokyo Institute of Technology All rights reserved.