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Title
Japanese:シリコンの微細切削における加工変質層に及ぼす高静水圧の影響 
English: 
Author
Japanese: 河野健太郎, 吉野 雅彦, 寺野元規.  
English: kentarou kouno, MASAHIKO YOSHINO, Motoki Terano.  
Language Japanese 
Journal/Book name
Japanese:機械学会第５回マイクロナノ工学シンポジウム講演論文集 
English: 
Volume, Number, Page         pp. 21-22
Published date 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese:機械学会第５回マイクロナノ工学シンポジウム 
English: 
Conference site
Japanese:仙台 
English: 

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