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Title
Japanese: 
English:Surface texture assessment of ultra-precision machined parts based on laser speckle pattern analysis 
Author
Japanese: 清水 一力, 澤野 宏, 吉岡 勇人, 新野 秀憲.  
English: Motochika Shimizu, Hiroshi Sawano, Hayato Yoshioka, Hidenori Shinno.  
Language English 
Journal/Book name
Japanese: 
English:Precision Engineering 
Volume, Number, Page Vol. 38    No. 1    pp. 1-8
Published date Jan. 6, 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese: 
English: 
Conference site
Japanese: 
English: 
DOI https://doi.org/10.1016/j.precisioneng.2013.06.005
Abstract Surface texture plays an important role in overall product specification, because the surface quality of the product is dominated by the nano-scale surface texture. This paper presents a surface texture assessment method for evaluating roughness and periodicity of surface structure with a laser speckle pattern analysis. By investigating the relation between surface texture and laser speckle pattern, characteristic parameters for describing a laser speckle pattern are proposed. The proposed characteristic parameters can evaluate the surface texture in entire observed area and in limited area in any given direction. Furthermore, the surface texture can be qualitatively assessed with a radar chart of the proposed laser speckle characteristic parameters.

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