低気圧酸素プラズマ中の励起状態密度分布に与える電子エネルギー分布関数の影響

Publication Information

Title

Japanese:	低気圧酸素プラズマ中の励起状態密度分布に与える電子エネルギー分布関数の影響
English:	Eﬀect of EEDF on the Excitation Kinetics of Low-Pressure Discharge Oxygen Plasma

Author

Japanese:	今野潤哉, 根津篤, 松浦治明, 赤塚洋.
English:	Junya KONNO, Atsushi NEZU, Haruaki MATSUURA, Hiroshi AKATSUKA.

Language

Japanese

Journal/Book name

Japanese:	プラズマ・核融合学会第30回年会オンライン予稿集
English:	On-Line Abstracts of The 30th Annual Meeting of Japan Society of Plasma Science and Nuclear Fusion Research

Volume, Number, Page

Published date

Nov. 18, 2013

Publisher

Japanese:	一般社団法人プラズマ・核融合学会
English:	Japan Society of Plasma Science and Nuclear Fusion Research

Conference name

Japanese:	プラズマ・核融合学会第30回年会
English:	The 30th Annual Meeting of Japan Society of Plasma Science and Nuclear Fusion Research

Conference site

Japanese:	東京
English:	Tokyo