An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology

Publication Information

Title

Japanese:
English:	An arrayed accelerometer device of a wide range of detection for integrated CMOS-MEMS technology

Author

Japanese:	小西敏文, 山根大輔, 松島隆明, 益一哉, 町田克之, 年吉洋.
English:	Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Kazuya Masu, Katsuyuki Machida, Hiroshi Toshiyoshi.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics

Volume, Number, Page

Vol. 53 pp. 27202

Published date

Jan. 21, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI