近接効果補正露光による量子細線構造のサイズ揺らぎの低減

Publication Information

Title

Japanese:	近接効果補正露光による量子細線構造のサイズ揺らぎの低減
English:	Reduction of the Size Fluctuation of Quantum-Wire Structures Fabricated by Proximity Effect Correction

Author

Japanese:	賈学英, 小島隆, 早船嘉典, 田村茂雄, 渡辺正裕, 荒井滋久.
English:	X. Y. Jia, T. Kojima, Y. Hayafune, S. Tamura, M. Watanabe, S. Arai.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

29a-X-4 2 586

Published date

Mar. 29, 1997

Publisher

Japanese:
English:

Conference name

Japanese:	第44回応用物理学会関係連合講演会
English:	Nat. Conv. Rec. of The Japan Soc. of Appl. Phys.

Conference site

Japanese:	千葉県
English:	Chiba