CaF<sub>2</sub>/Si(111)基板上ZnO薄膜のN.Gaコドーピング法による不純物制御

Publication Information

Title

Japanese:	CaF₂/Si(111)基板上ZnO薄膜のN.Gaコドーピング法による不純物制御
English:	Inpurity control of eptaxial ZnO thin films grown on CaF₂/Si(111) by N, Ga codoping

Author

Japanese:	岡野俊一, 鈴木充典, 渡辺正裕.
English:	S. Okano, M. Suzuki, M. Watanabe.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

31a-YL-3 3 1438

Published date

Mar. 31, 2001

Publisher

Japanese:
English:

Conference name

Japanese:	第48回応用物理学会関係連合講演会
English:	The 48th Spring Meeting of The Jpn. Soc. Of Appl. Phys. And Related Societies

Conference site

Japanese:	東京都
English:	Tokyo