縦型MOSFETとRTDによる微細素子の作成

Publication Information

Title

Japanese:	縦型MOSFETとRTDによる微細素子の作成
English:	Fabrication of vertical MOSFET integrated with resonant tunneling diode

Author

Japanese:	藤岡裕智, 筒井将史, 石川達也, 渡辺正裕, 浅田雅洋.
English:	H. Fujioka, M. Tsutsui, T. Ishikawa, M. Watanabe, M. Asada.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

30a-H-8 2 893

Published date

Mar. 30, 2002

Publisher

Japanese:
English:

Conference name

Japanese:	第49回応用物理学会関係連合講演会
English:	The 49th Spring Meeting of The Jpn. Soc. Of Appl. Phys. And Related Societies

Conference site

Japanese:	神奈川県
English:	Kanagawa