Applications of Incandescent Zirconia Atomic Oxygen Source to Vacuum Processes

Publication Information

Title

Japanese:
English:	Applications of Incandescent Zirconia Atomic Oxygen Source to Vacuum Processes

Author

Japanese:	尾島大樹, 金秀榮, 林克郎.
English:	Daiki Ojima, Suyeong Kim, Katsuro Hayashi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 4, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	International Conference on Solid State Ionics 19

Conference site

Japanese:
English: