Development of anisotropic in-plane stress during the film formation as an origin of high magnetic anisotropy in FeCoB films applicable to microwave devices

Publication Information

Title

Japanese:
English:	Development of anisotropic in-plane stress during the film formation as an origin of high magnetic anisotropy in FeCoB films applicable to microwave devices

Author

Japanese:	林原久憲, 饒平名礼生, 中川茂樹.
English:	Hisanori Hayashibara, Reo Yohena, Shigeki Nakagawa.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Nov. 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 58th Annual Magnetism and Magnetic Materials (MMM) Conference

Conference site

Japanese:	デンバー
English:	Denver, Colorado