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Publication Information
Title
Japanese:
English:
A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer
Author
Japanese:
山根 大輔
,
松島 隆明
,
小西 敏文
,
年吉 洋
,
町田 克之
,
益 一哉
.
English:
Daisuke Yamane
,
Takaaki Matsushima
,
Toshifumi Konishi
,
Hiroshi Toshiyoshi
,
Katsuyuki Machida
,
Kazuya Masu
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
pp. 69-72
Published date
Apr. 1, 2014
Publisher
Japanese:
English:
Conference name
Japanese:
English:
Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)
Conference site
Japanese:
English:
Cannes, Cote d'Azur
Official URL
http://cmp.imag.fr/conferences/dtip/dtip2014/
©2007
Institute of Science Tokyo All rights reserved.