A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer

Publication Information

Title

Japanese:
English:	A Dual-Axis MEMS Inertial Sensor Using Multi-Layered High-density Metal for an Arrayed CMOS-MEMS Accelerometer

Author

Japanese:	山根大輔, 松島隆明, 小西敏文, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 69-72

Published date

Apr. 1, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP2014)

Conference site

Japanese:
English:	Cannes, Cote d'Azur

Official URL